Delaware

MARATHON LS LLC

Massachusetts Since:

2018

MARATHON LS LLC

MANUS ROBOTICS INC

Massachusetts Since:

2016

MANUS ROBOTICS INC

Massachusetts Since:

2022

MANTACUS INC

Massachusetts Since:

2018

MALTA INC.

MAGMOTOR TECHNOLOGIES INC.

Massachusetts Since:

2008

MAGMOTOR TECHNOLOGIES INC.

LUNAR STATION CORP

Massachusetts Since:

2016

LUNAR STATION CORP

STAT HEALTH INFORMATICS, INC.

Massachusetts Since:

2020

STAT HEALTH INFORMATICS, INC.

LUCIOLE PHARMACEUTICALS, INC.

Massachusetts Since:

2020

LUCIOLE PHARMACEUTICALS, INC.

LUCELL DIAGNOSTICS INC.

Massachusetts Since:

2021

LUCELL DIAGNOSTICS INC.

Massachusetts Since:

2012

LOGIN VSI INC

META LOGIC CORPORATION

Massachusetts Since:

2022

META LOGIC CORPORATION

LITTORAL POWER SYSTEMS, INC.

Massachusetts Since:

2014

LITTORAL POWER SYSTEMS, INC.

LITTLE SPARROWS TECHNOLOGIES, INC

Massachusetts Since:

2018

LITTLE SPARROWS TECHNOLOGIES, INC

LINUS HEALTH, INC.

Massachusetts Since:

2019

LINUS HEALTH, INC.

LIFECANVAS TECHNOLOGIES INC

Massachusetts Since:

2017

LIFECANVAS TECHNOLOGIES INC