Delaware

MICROSENSE, LLC

Massachusetts Since:

2009

MICROSENSE, LLC

MICRO MAGNETICS, INC

Massachusetts Since:

2002

MICRO MAGNETICS, INC

ENVIRONMENTAL OPERATING SOLUTIONS INC

Massachusetts Since:

2003

ENVIRONMENTAL OPERATING SOLUTIONS INC

MICROBIOTIX, INC.

Massachusetts Since:

1998

MICROBIOTIX, INC.

METIS DESIGN CORPORATION

Massachusetts Since:

2002

METIS DESIGN CORPORATION

MERRIAM-WEBSTER INCORPORATED

Massachusetts Since:

1844

MERRIAM-WEBSTER INCORPORATED

MEDCHEM PARTNERS LLC

Massachusetts Since:

2006

MEDCHEM PARTNERS LLC

GSH CY NATICK, L.L.C.

Massachusetts Since:

2001

GSH CY NATICK, L.L.C.

MARKLEY LOWELL LLC

Massachusetts Since:

2003

MARKLEY LOWELL LLC

MAGNOLIA OPTICAL TECHNOLOGIES, INC.

Massachusetts Since:

2000

MAGNOLIA OPTICAL TECHNOLOGIES, INC.

MAGIQ TECHNOLOGIES, INC.

Massachusetts Since:

1999

MAGIQ TECHNOLOGIES, INC.

M SQUARED LASERS INC

Massachusetts Since:

2011

M SQUARED LASERS INC

LUX RESEARCH, INC.

Massachusetts Since:

2003

LUX RESEARCH, INC.

Massachusetts Since:

2005

LUMARRAY, INC.

DRS NAVAL POWER SYSTEMS, INC.

Massachusetts Since:

1998

DRS NAVAL POWER SYSTEMS, INC.