Summary

Optical Instruments

Industry

Description

Varioscale manufactures, delivers and supports unique processing and metrology equipment to electronics laboratories. Varioscale systems perform sample preparation essential to state-of-the-art failure analysis (FA), circuit edit (CE), reverse engineering (RE), as well as other verification and validation (V&V) methods including X-ray tomography, solid immersion lens (SIL) optical probing, and radiation hardness testing. Varioscale is a successful provider of sponsored research to develop integrated laboratory solutions for large scale, rapid imaging of integrated circuits (IC). On-going research combines advanced sample preparation with multi-beam scanning electron microscopy (SEM) and high-performance computing (HPC) to generate structure information (e.g. GDSII) from integrated circuit down to the 10 nm node. Varioscale has added in-situ measurement of silicon thickness to gallium focused ion beam (FIB) enabling accurate backside gas assisted chemical etching for circuit edit.

Profile

  • Incorporated in
    Delaware
  • Established since
    2004
  • Main/Branch
    Branch

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