XCALIPR CORPORATION
Summary
Optical metrology, non-contact characterization, non-destructive evaluation, modulated reflectance, photo-reflectance, pump-probe, semiconductor materials, electrical measurements, electronic band-structure, strain, dopant activation, electronic transport properties, carrier transport, diffusion length, recombination lifetime, diffusion coefficient, process development, on-product measurement, in-line process control, process monitoring, yield, high-volume manufacturing.
Industry
Profile
Address
Classification
Description
XCALIPR Corporation provides advanced Z-scanning laser photo-reflectance measurement technology for the precise, non-contact characterization of the electronic transport properties of semiconductor materials. The non-contact characterization of such semiconductor electronic transport properties is a long-standing problem in high-volume semiconductor device manufacturing. By enabling early process diagnostics, including process step isolation and rapid information turn around, the XCALIPR technology can be used to quickly improve yield learning and reduce manufacturing costs. The XCALIPR technology is quantitatively superior to other available techniques in terms of measurement sensitivity, acquisition time, spatial resolution, and system simplicity, and fully enables the non-contact evaluation of electronic transport properties directly on device wafers.
